Interaction between electric field and plasma in inductively coupled discharges

In regard to collisionless heating in inductively coupled discharges, two approaches have been widely adopted describe the energy transfer between electrons and radio frequency field. One approach is based on consistent kinetic theory, by which resulting field can be expressed as superposition of a series plane waves resonant interactions happen each wave, might dominate heating. Another single-particle approach, assumes that electric approximated spatially exponential function. The gained then obtained analytically, effective occurs due nonresonant transit time damping. Although demonstrated equivalence some parameter regimes, it still unclear how unite physical picture models. this work, test particle simulations conducted show interact with function sum waves. It found an function, interaction weak dominant, so Vahedi’s model good enough interaction. When imaginary part surface impedance becomes important, cannot well shown dominates power dissipation